Improved laser measurement using advanced techniques: A review

Abstract Laser measurement technique has been widely explored and applied in various fields in recent years due to its advantages of high measurement precision and resolution. However, applications in frontier fields such as MEMS motion measurement and robotics control pose have requirement for higher precision and resolution, which promote further studies in improving the performance of this technique. Many advanced techniques have been proposed and applied in the laser measurement system to optimize its performance, and the optimized measurement system has found its way in state‐of‐the‐art applications. In this invited paper, we focus on the latest investigations and new applications of the improved laser measurement methods, especially present recent research works regarding the laser triangulation measurement and the laser heterodyne vibration measurement. At the end, we have discussed further developments and challenges of laser measurement technique.