光电子学
微量气体
材料科学
栅栏
一氧化碳
分析物
波长
光学
化学
物理
生物化学
有机化学
物理化学
催化作用
作者
Ali Rostamian,Jason Midkiff,Kyoung Min Yoo,Hamed Dalir,Ray T. Chen
摘要
Gas sensing based on infrared absorption spectroscopy has attracted considerable attention owing to the rovibrational signatures of compounds of interest in the molecular fingerprint region. On-chip spectrometers are promising devices that unlike their on-chip commercially available counterparts offer sensing in portable applications. Carbon monoxide as one of the major air pollutants is dangerous even at very low concentrations. For real-time and precise detection of trace amounts of this gas we need a compact highly sensitive and selective sensor. In this paper, we design a grating array device in the InP/InGaAs platform for trace detection of carbon monoxide. The passive device consists of an InGaAs strip waveguide with InP as cladding, split-cascaded into an equally spaced array of 32 separate optical paths by y-junctions. At the output of each waveguide shallow etched subwavelength emitter gratings couple the light out. Light-analyte interaction occurs on top of the gratings as well as in free space. The device is optimized to operate at mid-IR wavelength of λ=4.6μm where the absorption peak of carbon monoxide is located. Using this structure, gas sensing is experimentally demonstrated down to a concentration of 10ppm. Feasibility of achieving lower limit of detection will be shown by design modifications. This device, can be simply integrated with QCL/QCD and be used for portable high sensitivity gas sensors.
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