AgO x Thin Film for Surface‐Enhanced Raman Spectroscopy

In this chapter, the recent progress of the applications of the Ag nanostructure generated from the treatment of silver oxide (AgOx) thin film for surface-enhanced Raman scattering (SERS) spectroscopy are reviewed. Specific Ag patterns with tunable SERS efficiencies are fabricated on the reactively sputtered AgOx thin film by using femtosecond laser beam. The large-area SERS chip consisted of the multilayered plasmonic coupling system based on the multilayered thin film sputtering and thermal annealing techniques are reported as well.