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90 积分 2024-10-11 加入
Surface nanoparticle monitoring for plasma etching chamber components using single particle inductively coupled plasma mass spectrometry
2个月前
已关闭
Surface nanoparticle monitoring for plasma etching chamber components using single particle inductively coupled plasma mass spectrometry
2个月前
已关闭
SiO2 etching and surface evolution using combined exposure to CF4/O2 remote plasma and electron beam
3个月前
已完结
In situ atom-resolved observation of Si (111) 7x7 surface with F radical and Ar ion irradiation simulated atomic layer etching
4个月前
已完结
Plasma atomic layer etching of tantalum nitride with surface fluorination and Ar ion sputtering
4个月前
已完结
Low-temperature plasma atomic layer etching of molybdenum via sequential oxidation and chlorination
4个月前
已完结
Revealing the controlling mechanisms of atomic layer etching for high-k dielectrics in conventional inductively coupled plasma etching tool
5个月前
已完结
Investigating the effects of etching systems and low-temperature thermal processing on hafnium zirconium oxide thin film properties
5个月前
已完结
Deposit and etchback approach for ultrathin Al2O3 films with low pinhole density using atomic layer deposition and atomic layer etching
5个月前
已完结
Ultrathin ZrO2 thickness control on TiO2/ZrO2 core/shell nanoparticles using ZrO2 atomic layer deposition and etching
6个月前
已完结
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