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Frequency and electrode shape effects on etch rate uniformity in a dual-frequency capacitive reactor
2小时前
已完结
Shaped electrode and lens for a uniform radio-frequency capacitive plasma
2小时前
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Effect of different frequency combination on ArF photoresist deformation and silicon dioxide etching in the dual frequency superimposed capacitively coupled plasmas
3小时前
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Effect of low frequency voltage waveform on plasma uniformity in a dual-frequency capacitively coupled plasma
25天前
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Electromagnetic effects in high-frequency large-area capacitive discharges: A review
2个月前
已完结
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