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210 积分 2025-05-16 加入
Integrated fab process for metal oxide EUV photoresist
24天前
已完结
Trends in photoresist materials for extreme ultraviolet lithography: A review
1个月前
已完结
Enhancement of photosensitivity and stability of Sn-12 EUV resist by integrating photoactive nitrate anion
1个月前
已完结
Computational Study of Organotin Oxide Systems for Extreme Ultraviolet Photoresist
1个月前
已完结
Key Challenges and Opportunities for Advanced Extreme Ultraviolet Lithography Photoresist Materials
1个月前
已完结
High-resolution chemical patterns from negative tone resists for the integration of extreme ultraviolet patterns of metal-oxide resists with directed self-assembly of block copolymers
1个月前
已完结
Metal oxide resist (MOR) EUV lithography processes for DRAM application
1个月前
已完结
Inhibition of Free Radical Polymerization: A Review
1个月前
已完结
Unraveling the reaction mechanisms in a chemically-amplified EUV photoresist from a combined theoretical and experimental approach
1个月前
已完结
Laminate Al2O3/Ta2O5 Metal/Insulator/Insulator/Metal (MIIM) Devices for High-Voltage Applications
1个月前
已完结
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