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184 积分 2025-08-18 加入
Atomic Layer Deposition of WO3 Thin Films using W(CO)6 and O3 Precursors
15天前
已完结
Stress Management in Thin-Film Gas-Permeation Barriers
16天前
已完结
Surface reactions of aminosilane precursors during N2 plasma‐assisted atomic layer deposition of SiNx
16天前
已完结
Atomic layer deposition and selective etching of ruthenium for area-selective deposition: Temperature dependence and supercycle design
25天前
已完结
Area-Selective Deposition: Fundamentals, Applications, and Future Outlook
26天前
已完结
Low-Temperature Al2O3 Atomic Layer Deposition
1个月前
已完结
Effect of deposition temperature and surface reactions in atomic layer deposition of silicon oxide using Bis(diethylamino)silane and ozone
1个月前
已完结
Atomic layer deposition of TiO2 from TiCl4 and O3
2个月前
已完结
Mechanistic study on In2O3 atomic layer deposition using InCp and H2O/O2
2个月前
已完结
Properties of N-rich Silicon Nitride Film Deposited by Plasma-Enhanced Atomic Layer Deposition
2个月前
已完结