Lv11
84 积分 2025-03-04 加入
专注学术 研发
Reversible absorption of NF3 with high solubility in Lewis acidic ionic liquids
4天前
已完结
Advances in low GWP etch gasses
2个月前
已完结
A Study on Greenhouse Gas (PFCs) Reduction in Plasma Scrubbers to Realize Carbon Neutrality of Semiconductors and Displays
2个月前
已完结
Experimental and Theoretical Studies for Optimization of Nf3 Removal from Semiconductor Processes Using Microwave Plasma Torch
2个月前
已完结
Mineralization of SF6 and NF3 fluorinated compounds for greenhouse gas abatement by oxalates
2个月前
已完结
Perfluorocompound Emissions Control and Kinetic Characteristics in Point-of-Use Wet-Thermal-Wet Abatement of Plasma-Enhanced Chemical Vapor Deposition Chamber Cleaning
2个月前
已完结
Study of the enrichment of NF3 waste gas using zeolite and polymeric membranes
2个月前
已完结
Perfluorocompound Emissions Control and Kinetic Characteristics in Point-of-Use Wet-Thermal-Wet Abatement of Plasma-Enhanced Chemical Vapor Deposition Chamber Cleaning
2个月前
已完结
Mineralization of SF6 and NF3 fluorinated compounds for greenhouse gas abatement by oxalates
2个月前
已关闭
Nitrogen Trifluoride Emissions in China from 2017 to 2021 Derived from Atmospheric Observations
2个月前
已完结
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