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50 积分 2022-03-20 加入
Self-bias voltage formation and charged particle dynamics in multi-frequency capacitively coupled plasmas
6小时前
待确认
Characteristics of silicon nitride deposited by plasma‐enhanced chemical vapor deposition using a dual frequency radio‐frequency source
6小时前
已完结
Humidity-induced optical property variations in PECVD silicon oxynitride films for advanced lithography applications
3个月前
已完结
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