Lv6
3126 积分 2020-10-21 加入
DSA materials and processes development for ≤ P24 EUV resist L/S pattern rectification
1个月前
已关闭
Computational enablement for designs with sub-20nm metal tip to tip using cut shapes from grapho-epitaxy directed self-assembly
1个月前
已完结
The integration of 193i and DSA for BEOL metal cuts/blocks targeting sub-20nm tip-to-tip CD
1个月前
已完结
DSA template mask determination and cut redistribution for advanced 1D gridded design
1个月前
已完结
Establishing a sidewall image transfer chemo-epitaxial DSA process using 193 nm immersion lithography
2个月前
已完结
Tailoring the Morphology Transformation and Simultaneous Generation of Bimodal Patterns through Directed Self-Assembly of Binary Cylindrical Block Copolymer/Homopolymer Blends
3个月前
已完结
Tailoring the Morphology Transformation and Simultaneous Generation of Bimodal Patterns through Directed Self-Assembly of Binary Cylindrical Block Copolymer/Homopolymer Blends
6个月前
已完结
Quadruple-hole multiplication by directed self-assembly of block copolymer
6个月前
已完结
The integration of 193i and DSA for BEOL metal cuts/blocks targeting sub-20nm tip-to-tip CD
6个月前
已完结
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