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340 积分 2025-07-26 加入
Anomaly detection through on-line isolation Forest: An application to plasma etching
1天前
已完结
Fault detection in reactive ion etching systems using one-class support vector machines
1天前
已完结
Machine Learning-Based Process-Level Fault Detection and Part-Level Fault Classification in Semiconductor Etch Equipment
8天前
已完结
Reaction and Transport of Multiple Species during Plasma Etching
12天前
已完结
Plasma-chamber wall interaction and its impact on polymer deposition in inductively-coupled C4F8/Ar plasmas
13天前
已完结
Defective wafer detection using a denoising autoencoder for semiconductor manufacturing processes
13天前
已完结
A variational autoencoder for a semiconductor fault detection model robust to process drift due to incomplete maintenance
13天前
已完结
Improvement of Virtual Diagnostics Performance for Plasma Density in Semiconductor Etch Equipment Using Variational Auto-Encoder
13天前
已完结
Neural-Network-Based Sensor Fusion of Optical Emission and Mass Spectroscopy Data for Real-Time Fault Detection in Reactive Ion Etching
22天前
已完结
Neural network modeling of reactive ion etching using optical emission spectroscopy data
22天前
已完结
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