Lv7
5000 积分 2020-04-03 加入
High efficiency regulation method to generate illumination source by adopting micromirror array in DUV lithography
10小时前
已完结
Design of zoom system for pupil shaping of lithography tool
5个月前
已完结
A Dark-Field Surface Defects Detection Method for Multi-Surface-Shape Large Aperture Optical Components
7个月前
已完结
Development of multi-stage optical variable attenuator system and its control method for wafer inspection system
7个月前
已完结
Accuracy verification methodology for computer-generated hologram used for testing a 3.5-meter mirror based on an equivalent element
10个月前
已完结
Dynamic wavefront measurement with a point diffraction interferometer based on birefringence polarization beam splitting
1年前
已完结
The surface PSD and image degradation due to mid-spatial-frequency errors
1年前
已关闭
Review on mid-spatial frequency error suppression in optical components manufacturing
1年前
已完结
Analyzing and mitigating mid-spatial frequency errors
1年前
已完结
On the Use of ISO 10110-8 for Specification of Optical Surfaces with Mid-Spatial Frequency Errors
1年前
已完结
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