Lv21
154 积分 2026-04-21 加入
Simulation and optimization of the atomic layer deposition process in high aspect ratio substrates
2小时前
已完结
Kinetic analysis and steric-hindrance effects in thermal atomic layer deposition of high-purity cobalt films with dicobalt hexacarbonyl tert-butylacetylene as the precursor
14天前
已完结
Deep ensemble neural network-driven modeling of etching process in advanced integrated circuit manufacturing
27天前
已完结
Plasma-enhanced atomic layer deposition of SiO2 film using capacitively coupled Ar/O2 plasmas: A computational investigation
1个月前
已完结
Modeling conformality of Al2O3 deposited in high aspect ratio structure by atomic layer deposition
1个月前
已完结
Neural operators for accelerating scientific simulations and design
1个月前
已完结
Surface‐Selective Nucleation of Polymeric Resists for Bottom‐Up Nanofabrication
1个月前
已完结
Impact of sputtering and redeposition on the morphological profile evolution during ion-beam etching of blazed gratings
2个月前
已完结
Comprehensive studies on deep learning applicable to TCAD
2个月前
已完结
Improvement of prediction models for dry etching characteristics by introducing plasma parameters as explanatory variables
2个月前
已完结
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