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550 积分 2025-05-14 加入
Gold and platinum diffusion: The key to the understanding of intrinsic point defect behavior in silicon
17天前
已完结
Characterization of mirror-like wafer surfaces using the magic mirror method
23天前
已完结
Detection of surface defects of Si epitaxial wafers by the magic-mirror approach
23天前
已完结
Stress in undoped LPCVD polycrystalline silicon
1个月前
已完结
Analysis of Influencing Factors on Silicon Epitaxial Growth in Horizontal Single‐Wafer Reactor through Orthogonal Test
1个月前
已完结
Modeling the influence of arsenic autodoping on the sheet resistance of epitaxial silicon films and its application to statistical process control (SPC)
1个月前
已完结
Flow effects in epitaxial autodoping
1个月前
已完结
A trapping mechanism for autodoping in silicon epitaxy—II. Parameter extraction and simulations
1个月前
已完结
SOI bonded wafer process for high precision MEMS inertial sensors
1个月前
已完结
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