Lv12
50 积分 2025-04-22 加入
Parameter Dependences of Ion Energy Distribution and Ion Flux in Dual-Frequency Capacitively Coupled Argon Discharges
2个月前
已完结
Enhancing plasma uniformity in SiH4/NH3 capacitively coupled plasmas via dielectric structure adjustment positioning adjacent to the power electrode
2个月前
已关闭
Plasma asymmetry effects induced by inter-electrode thermal gradients in capacitively coupled radio frequency plasmas
2个月前
已完结
Two‐Dimensional Fluid‐Analytical Hybrid Modelling of the Electromagnetic Effects in Very High Frequency Capacitively Coupled Ar/CF 4 Plasmas
2个月前
已完结
Experimental investigation of the radially-dependent ignition process in a pulsed capacitively coupled RF discharge: Effects of pressure, voltage and afterglow duration
2个月前
已完结
Study on the etching mechanism of quartz using dual-frequency (60 MHz/400 KHz) capacitively coupled C4F8/Ar/O2 plasma
2个月前
已完结
A study on etching properties of quartz and silicon by a dual-frequency (60 MHz/400 kHz) capacitively coupled NF3/Ar/O2 plasma: effect of pressure
2个月前
已完结
Transformer coupled toroidal wave-heated remote plasma sources operating in Ar/NF3 mixtures
2个月前
已完结
The Etching Behaviour and Fluorine-Based-Plasma Resistance of YOF Coatings Deposited by Atmospheric Plasma Spraying
2个月前
已完结
Influence of the electron kinetics on Ar/NF3 inductively coupled plasma
2个月前
已完结
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