Lv21
180 积分 2024-09-13 加入
Improvements on pattern fidelity at high curvature region of curvilinear mask with a novel method of MPC
1小时前
求助中
Creating nonideality: enabling cross-platform process matching solutions with MPC (and a lot of hard work)
1小时前
求助中
MPC simplification for established model-based mask process correction solutions
1个月前
已完结
Performance of a variable shaped vector scan e-beam system for maskmaking
1个月前
已完结
Variable shaped beam lithography capabilities enhancement by "small-shots" correction
1个月前
已完结
An efficient tool to rewrite a VSB12 format jobdeck for any target VSB12 machine
1个月前
已完结
Balancing mask manufacturability and image quality with inverse lithography: a study on variable fracture sizes
1个月前
已完结
Performance of a variable shaped vector scan e-beam system for maskmaking
1个月前
已完结
MPC strategies for multi-beam mask writers
1个月前
已完结
Influence of the dose assignment and fracturing type on patterns exposed by a variable shaped e-beam writer: simulation vs experiment
1个月前
已完结
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