Lv3
238 积分 2024-12-18 加入
Control of etch profiles in high aspect ratio holes via precise reactant dosing in thermal atomic layer etching
16小时前
已完结
Selective Atomic Layer Etching for Silicon Device Fabrication
17小时前
已完结
Dry Etching of SiO2Thin Films with Perfluoropropenoxide–O2and Perfluoropropene–O2Plasmas
6天前
已完结
Dielectric Hole Etching With C2F4O and C2HF3O as a Replacement of CF4/O2
6天前
已完结
Spontaneous etching of B2O3 by HF gas studied using infrared spectroscopy, mass spectrometry, and density functional theory
21天前
已完结
Digital Etching of Molybdenum Interconnects Using Plasma Oxidation
1个月前
已关闭
Low-temperature plasma atomic layer etching of molybdenum via sequential oxidation and chlorination
1个月前
已完结
Low-temperature etching of silicon oxide and silicon nitride with hydrogen fluoride
1个月前
已完结
Plasma atomic layer etching of ruthenium by oxygen adsorption-removal cyclic process
1个月前
已完结
Highly Selective Plasma Etching Technique for Molybdenum
1个月前
已完结
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