Lv11
44 积分 2025-05-15 加入
Phase defect inspection for a patterned EUV mask based on photoelectron microscopy
3天前
已完结
A novel CNN-transformer integrated with cross-attention mechanism for intelligent diagnosis of rolling bearing faults
1个月前
已完结
Accuracy, robustness, and computational efficiency in bearing fault detection and diagnosis: Comparison of CNN and CNN-Transformer
1个月前
已完结
Three-dimensional characterization of EUV mask blank defects with photoemission electron microscopy assisted by neural network transfer learning
3个月前
已完结
Actinic defect inspection and characterization for extreme ultraviolet mask blanks
5个月前
已完结
Large-range lithography misalignment sensing with sub-2-nm accuracy through automatic dual-frequency Moiré fringes analysis
6个月前
已完结
Measurement of latent image in resist using scanning probe techniques
10个月前
已完结
Using a FEM-based Maxwell solver and CD-RSoXS measurement for the analysis of photoresist pattern
1年前
已关闭
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