Lv11
70 积分 2025-09-30 加入
Investigating the partial plastic formation mechanism of typical scratches on silicon wafers induced by rogue particles during chemical mechanical polishing
2小时前
待确认
Cr and CrOx etching using SF6 and O2 plasma
1个月前
已完结
Focused, Nanoscale Electron-Beam-Induced Deposition and Etching
3个月前
已完结
ELECTRON IMPACT DISSOCIATIVE IONIZATION OF NITROSYL CHLORIDE
3个月前
已完结
Study of surface control during barrier layer etch
3个月前
已完结