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98 积分 2024-12-20 加入
Thermo-mechanical behavior analysis of extreme-ultraviolet pellicle cooling with H2 flow
22天前
已完结
Pattern dependent distortion and temperature variation in EUV mask
22天前
已完结
Propagation characteristics of coherent array beams from carbon dioxide waveguide lasers
1个月前
已完结
Regions of spreading of Gaussian array beams propagating through oceanic turbulence
1个月前
已完结
Fiber coupling efficiency for random light and its applications to lidar
2个月前
已完结
Spectrum of Turbulent Fluctuations of the Sea-Water Refraction Index
2个月前
已完结
Particle removal tool to repair particle defects on EUV reticles
4个月前
已完结
Investigation of thermophoretic protection with speed-controlled particles at 100, 50, and 25mTorr
4个月前
已关闭
Protection of extreme ultraviolet lithography masks. I. Thermophoretic protection factors at low pressure for diffusing nanoscale particles
4个月前
已完结
Technical Note: Concepts for protection of EUVL masks from particle contamination
4个月前
已完结
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