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20 积分 2025-07-14 加入
Heat-transfer modeling of the gas gap under a wafer
3天前
已完结
An efficient chemistry-enhanced CFD model for the investigation of the rate-limiting mechanisms in industrial Chemical Vapor Deposition reactors
25天前
已完结
Phenomenological and Elementary Reaction Analysis of Poly-crystalline Silicon CVD Process
27天前
已关闭
Modeling and Simulation of Ion-filtered Inductively Coupled Plasma Using Argon Plasma
1个月前
已完结
Experimental and simulation approach for process optimization of atomic layer deposited thin films in high aspect ratio 3D structures
3个月前
已完结
Thermal Oxidation of Heavily Phosphorus‐Doped Silicon
3个月前
已完结
Analysis of Radiative Heat Transfer and Mass Transfer during Multiwafer Low‐Pressure Chemical Vapor Deposition
4个月前
已完结
Polycrystalline-silicon LPCVD by silane pyrolysis: The effect of hydrogen injection
4个月前
已完结
Polycrystalline-silicon LPCVD by silane pyrolysis: The effect of hydrogen injection
4个月前
已完结
Low‐Pressure Chemical Vapor Deposition of Polycrystalline Silicon: Analysis of Nonuniform Growth in an Industrial‐Scale Reactor
4个月前
已关闭
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