Lv31
368 积分 2026-06-27 加入
Gradient-Based Inverse Lithography for EUV Masks via the Waveguide Method and a Physics-Informed Neural Operator
2小时前
待确认
Adaptive Reinforcement Learning for Lithography Optimization (ARLO)
2小时前
已完结
HeteroM-ILT: Hybrid CNN and State Space Model for High-Fidelity Mask Optimization
2小时前
已完结
MF-ILT: Efficient Gradient-Driven Inverse Lithography Technology with Multi-Scale Adaptation and Frequency-Domain Segmentation Synergy
2小时前
已完结
Hi-ILT: A Hybrid End-to-End Framework of Lightweight Hierarchical VAE and Physics-Guided ILT for Inverse Lithography Technology
2小时前
已完结
Mastering Inverse Lithography Technology: GPU Acceleration, Generative AI and Reinforcement Learning
2小时前
求助中
CurvyILT 2.0: GPU-Accelerated Inverse Lithography Targeting Full Chip Optimization
2小时前
已完结
LithoGRPO: Fast Inverse Lithography via GRPO Reinforced Flow Matching
2小时前
待确认
Advancements and Challenges in Inverse Lithography Technology: A Review of Artificial Intelligence-Based Approaches
2小时前
已完结
Enforcement of Curvy MRC Compliance with Reduced Complexity in Inverse Lithography
2小时前
已完结
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