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16 积分 2026-03-04 加入
Experimental and mechanistic investigation of temperature and humidity effects on electroadhesion performance of electrostatic pads
45分钟前
待确认
Design space of electrostatic chuck in etching chamber
3个月前
已完结
Enhanced temperature uniformity of electrostatic chuck: ceramic surface contact ratio and backside gas pressure
3个月前
已完结
Heat transfer mechanism of electrostatic chuck surface and wafer backside to improve wafer temperature uniformity
3个月前
已完结
Like-charge attraction between two identical dielectric spheres in a uniform electric field: a theoretical study via a multiple-image method and an effective-dipole approach
5个月前
已完结
Design and kinetostatic analysis of a tip-stiffness improved compliant continuum robot using anti-buckling universal joints
6个月前
已完结
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