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Etch and deposition co-optimization: a pathway to enabling high aspect ratio 3D NAND Flash ONON channel hole patterning
3个月前
已关闭
Fast and realistic 3D feature profile simulation platform for plasma etching process
4个月前
已完结
Plasma Etch Challenges for Gate Patterning
4个月前
已完结
Review and future perspective of feature scale profile modeling for high-performance semiconductor devices
4个月前
已完结
Precise and practical 3D topography simulation of high aspect ratio contact hole etch by using model optimization algorithm
7个月前
已完结
Multiscale simulation of physical vapor deposition
8个月前
已完结
High performance ceramic films and coatings : proceedings of the Satellite Symposium 1 on High Performance Ceramic Films and Coatings of the 7th International Meeting on Modern Ceramics Technologies (7th CIMTEC-World Ceramics Congress), Montecatini Terme, Italy, 27-30 June, 1990
8个月前
已关闭
Multiscale simulation of physical vapor deposition
8个月前
已完结
Semiconductor Manufacturing Technology
10个月前
已完结
Dissociative properties of C4F6 obtained using computational chemistry
11个月前
已完结
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