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High performance ceramic films and coatings : proceedings of the Satellite Symposium 1 on High Performance Ceramic Films and Coatings of the 7th International Meeting on Modern Ceramics Technologies (7th CIMTEC-World Ceramics Congress), Montecatini Terme, Italy, 27-30 June, 1990
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Multiscale simulation of physical vapor deposition
10天前
已完结
Semiconductor Manufacturing Technology
1个月前
已完结
Dissociative properties of C4F6 obtained using computational chemistry
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Atomic layer etching of titanium nitride with surface modification by Cl radicals and rapid thermal annealing
4个月前
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Line wiggling due to plasma-induced film stress and prevention by surface roughness modification
5个月前
已关闭
Mechanism of highly selective etching of SiCN by using NF3/Ar-based plasma
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Evolution of lithography-to-etch bias in multi-patterning processes
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已完结
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