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1446 积分 2021-10-15 加入
Negative Tone Metallic Organic Resists with Improved Sensitivity for Plasma Etching: Implications for Silicon Nanostructure Fabrication and Photomask Production
12天前
已完结
Induced Chemical Networking of Organometallic Tin in a Cyclic Framework for Sub-10 nm Patterning and Interconnect Application
12天前
已完结
Macrocycle Network-Aided Nanopatterning of Inorganic Resists on Silicon
12天前
已完结
Design and implementation of the next generation electron beam resists for the production of EUVL photomasks
12天前
已完结
Enhancing the sensitivity of a high resolution negative-tone metal organic photoresist for extreme ultra violet lithography
12天前
已完结
Evaluation of Thermal and Radiation Induced Chemistries of Metal Oxo–Hydroxo Clusters for Next-Generation Nanoscale Inorganic Resists
12天前
已完结
Tuning the Performance of Negative Tone Electron Beam Resists for the Next Generation Lithography
12天前
已完结
Dry heterometallic resist processing based on thermal sublimation deposition and development
12天前
已完结
Sensitivity enhancement of a high-resolution negative-tone nonchemically amplified metal organic photoresist for extreme ultraviolet lithography
12天前
已完结
Tunneling and negative resistance effects for composite materials containing polyoxometalate molecules
12天前
已完结
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