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Plasma Etching Fundamentals and Applications
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Title Pages
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Flowable oxide CVD Process for Shallow Trench Isolation in Silicon Semiconductor
12天前
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Effect of Plasma Etching Depth on Subsurface Defects in Quartz Crystal Elements
13天前
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Plasma resistance of quartz with a glass coating layer by aerosol deposition
25天前
已完结
Surface reaction during thermal atomic layer etching of aluminum oxide films using fluorine radicals and trimethylaluminum
25天前
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Etch Defect Reduction Using SF6/O2 Plasma Cleaning and Optimizing Etching Recipe in Photo Resist Masked Gate Poly Silicon Etch Process
29天前
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The Chemistry of Water on Alumina Surfaces: Reaction Dynamics from First Principles
1个月前
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Selective dissolution of nanolamellar Ti–41 at.% Al alloy single crystals
2个月前
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