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A Dual-Mode Flexible Sensor Based on the Combination of Triboelectric and Piezoresistive Sensing to Simultaneously Monitor Non-Contact/Contact Pressure

摩擦电效应 压阻效应 压力传感器 接近传感器 电压 触觉传感器 计算机科学 声学 材料科学 电子工程 灵敏度(控制系统) 接触力 电气工程 光电子学 机器人 工程类 人工智能 机械工程 物理 复合材料 量子力学
作者
Liangsong Huang,Xiaofei Bu,Peng Zhang,Yuxia Li,S. H. Wang,Zhongkai Zhao,Zhifu Chen,Jiapeng Tan
出处
期刊:ACS applied electronic materials [American Chemical Society]
卷期号:5 (12): 6787-6796 被引量:19
标识
DOI:10.1021/acsaelm.3c01251
摘要

High-performance flexible sensors have broad application prospects in various fields such as robotic skin, intelligent prosthetic hands, and wearable devices. However, a single sensing type of sensor is limited by its own type and cannot adapt to different types of application scenarios. Herein, this paper proposes a dual-mode flexible sensor based on the combination of triboelectric and piezoresistive sensing (TRS) to simultaneously monitor noncontact/contact pressure in real time. In the triboelectric sensing mode, the object proximity distance can be determined by its voltage and current outputs, and the sharpness can be further judged by the electrode array. It can realize the accurate detection of distance within 2 cm of the object proximity distance, and it can generate a voltage signal of 2.75 V when the minimum proximity distance of the object is 0.5 cm. In the piezoresistive sensing mode, the sensing performance is optimized by adding a pyramid microstructure on the surface of the piezoresistive layer, making its sensitivity reach −0.1147 kPa at a pressure of 0–6 kPa and having high dynamic response and stability in repeatability testing. The combination of the two modes solves the problem of difficulty in accurately sensing pressure signals and noncontact signals for a single type of sensor. In practical applications, the system has been used to identify two states of object proximity and pressure and has shown ideal performance. This provides strategies and references for further expanding the application scenarios of flexible sensors and has broad application prospects in providing stronger human–machine interaction interfaces.
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