真空沉积
离子液体
真空蒸发
材料科学
超高真空
结晶度
薄膜
真空电弧
物理气相沉积
沉积(地质)
蒸发
纳米技术
椭圆偏振法
化学工程
化学
有机化学
复合材料
物理化学
工程类
阴极
生物
沉积物
催化作用
古生物学
物理
热力学
出处
期刊:Molecules
[MDPI AG]
日期:2023-02-20
卷期号:28 (4): 1991-1991
被引量:4
标识
DOI:10.3390/molecules28041991
摘要
Since the discovery of ionic liquids (ILs) as a new class of liquid that can survive in a vacuum at room temperature, they have been aimed at being characterized with vacuum analysis techniques and used in vacuum processes for the last two decades. In this review, our state-of-the-art of the vacuum engineering of ILs will be introduced. Beginning with nanoscale vacuum deposition of IL films and their thickness-dependent ionic conductivity, there are presented some new applications of the ellipsometry to in situ monitoring of the thickness of IL films and their glass transitions, and of the surface thermal fluctuation spectroscopy to investigation of the rheological properties of IL films. Furthermore, IL-VLS (vapor-liquid-solid) growth, a vacuum deposition via IL, has been found successful, enhancing the crystallinity of vacuum-deposited crystals and films, and sometimes controlling their surface morphology and polymorphs. Among recent applications of ILs are the use of metal ions-containing IL and thin film nano IL gel. The former is proposed as a low temperature evaporation source of metals, such as Ta, in vacuum deposition, while the latter is demonstrated to work as a gate electrolyte in an electric double layer organic transistor.
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