纳米压印光刻
材料科学
超声波传感器
聚合物
模具
聚对苯二甲酸乙二醇酯
复合材料
热的
振动
平版印刷术
纳米光刻
纳米技术
光电子学
制作
声学
气象学
病理
替代医学
物理
医学
作者
Chien‐Hung Lin,Chih-Yu Wang,Rongshun Chen
摘要
We demonstrate the assisted-heating for ultrasonic nanoimprint lithography (U-NIL) to solve the problem of ultrasonic vibrations only apply to the interface between the convexity of the mold and the polymer, which the heat from ultrasonic vibrations is unable to be transferred into the cavity in time. Using poly(ethylene terephthalate) (PET) as imprinted polymer, we have compared imprinted results between assisted-heating U-NIL and U-NIL. There is a good sufficient imprinted result to show that increasing thermal energy on the polymer can speed up the polymer flow to replicate patterns uniformity.
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