Assisted-heating for ultrasonic nanoimprint lithography

We demonstrate the assisted-heating for ultrasonic nanoimprint lithography (U-NIL) to solve the problem of ultrasonic vibrations only apply to the interface between the convexity of the mold and the polymer, which the heat from ultrasonic vibrations is unable to be transferred into the cavity in time. Using poly(ethylene terephthalate) (PET) as imprinted polymer, we have compared imprinted results between assisted-heating U-NIL and U-NIL. There is a good sufficient imprinted result to show that increasing thermal energy on the polymer can speed up the polymer flow to replicate patterns uniformity.