材料科学
杰纳斯
石墨烯
腐蚀
涂层
双层
兴奋剂
图层(电子)
原电池
电偶腐蚀
铜
扩散阻挡层
纳米技术
双层石墨烯
冶金
光电子学
膜
化学
生物化学
作者
Mengze Zhao,Zhibin Zhang,Wujun Shi,Yiwei Li,Chaowu Xue,Yuxiong Hu,Mingchao Ding,Zuo‐Feng Zhang,Zhi Liu,Ying Fu,Can Liu,Muhong Wu,Zhongkai Liu,Xin-Zheng Li,Zhu‐Jun Wang,Kaihui Liu
标识
DOI:10.1038/s41467-023-43357-1
摘要
The atomic-thick anticorrosion coating for copper (Cu) electrodes is essential for the miniaturisation in the semiconductor industry. Graphene has long been expected to be the ultimate anticorrosion material, however, its real anticorrosion performance is still under great controversy. Specifically, strong electronic couplings can limit the interfacial diffusion of corrosive molecules, whereas they can also promote the surficial galvanic corrosion. Here, we report the enhanced anticorrosion for Cu simply via a bilayer graphene coating, which provides protection for more than 5 years at room temperature and 1000 h at 200 °C. Such excellent anticorrosion is attributed to a nontrivial Janus-doping effect in bilayer graphene, where the heavily doped bottom layer forms a strong interaction with Cu to limit the interfacial diffusion, while the nearly charge neutral top layer behaves inertly to alleviate the galvanic corrosion. Our study will likely expand the application scenarios of Cu under various extreme operating conditions.
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