可靠性工程
可靠性(半导体)
根本原因分析
根本原因
扫描电子显微镜
核工程
材料科学
功率(物理)
同步加速器
工程物理
工程类
法律工程学
核物理学
复合材料
物理
量子力学
作者
Jie Chen,Shuang Zhou,Zhen‐Guo Yang
标识
DOI:10.1109/tdmr.2024.3379498
摘要
The SiC die has broad application prospects in new energy vehicles due to its excellent performances. In recent years, with the continuous development, the safety and reliability of SiC power modules have become particularly important and highly valued. In this paper, a case about the abnormal failure of SiC power modules during the High Voltage-High Humidity High Temperature Reverse Bias (HV-H3TRB) tests was addressed. According to the failure phenomena, a systematical investigation was conducted to explore the root cause by a series of methods such as failure point localization, synchrotron radiation infrared spectrum (SR-IR), time of flight-secondary ion mass spectrometry (TOF-SIMS), the ion beam method, scanning electron microscope (SEM) equipped with the energy dispersive spectrometer (EDS). Finally, the root cause of the failure was determined through comprehensive analysis, and based on the conclusions, some corresponding countermeasures were also proposed. Hopefully, the achievements obtained in this paper would be of great significance for improving the reliability of SiC power modules and avoiding similar failure in future manufacturing process.
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