First direct observation of the built-in electric field and oxygen vacancy migration in ferroelectric Hf0.5Zr0.5O2 film during electrical cycling

By combining differential phase contrast scanning transmission electron microscope (DPC-STEM) and Energy Disperse Spectroscopy (EDS) analysis, the migration of oxygen vacancies and the evolution of the built-in field in ferroelectric HfO 2 are observed for the first time.