Versailles Project on Advanced Materials and Standards interlaboratory study on intensity calibration for x-ray photoelectron spectroscopy instruments using low-density polyethylene

低密度聚乙烯 标准差 分析化学(期刊) 校准 谱线 分光计 材料科学 聚乙烯 光学 化学 数学 物理 统计 色谱法 天文 复合材料
作者
Benjamen P. Reed,David J. H. Cant,Steven J. Spencer,Abraham Jorge Carmona-Carmona,A. Bushell,Alberto Herrera‐Gómez,Akira Kurokawa,Andreas Thißen,Andrew G. Thomas,Andrew J. Britton,Andrzej Bernasik,Anne Fuchs,Arthur P. Baddorf,B. Böck,Bill Theilacker,Bin Cheng,David G. Castner,David Morgan,David Valley,Elizabeth A. Willneff
出处
期刊:Journal of vacuum science & technology [American Vacuum Society]
卷期号:38 (6): 063208-063208 被引量:30
标识
DOI:10.1116/6.0000577
摘要

We report the results of a Versailles Project on Advanced Materials and Standards interlaboratory study on the intensity scale calibration of x-ray photoelectron spectrometers using low-density polyethylene (LDPE) as an alternative material to gold, silver, and copper. An improved set of LDPE reference spectra, corrected for different instrument geometries using a quartz-monochromated Al Kα x-ray source, was developed using data provided by participants in this study. Using these new reference spectra, a transmission function was calculated for each dataset that participants provided. When compared to a similar calibration procedure using the NPL reference spectra for gold, the LDPE intensity calibration method achieves an absolute offset of ∼3.0% and a systematic deviation of ±6.5% on average across all participants. For spectra recorded at high pass energies (≥90 eV), values of absolute offset and systematic deviation are ∼5.8% and ±5.7%, respectively, whereas for spectra collected at lower pass energies (<90 eV), values of absolute offset and systematic deviation are ∼4.9% and ±8.8%, respectively; low pass energy spectra perform worse than the global average, in terms of systematic deviations, due to diminished count rates and signal-to-noise ratio. Differences in absolute offset are attributed to the surface roughness of the LDPE induced by sample preparation. We further assess the usability of LDPE as a secondary reference material and comment on its performance in the presence of issues such as variable dark noise, x-ray warm up times, inaccuracy at low count rates, and underlying spectrometer problems. In response to participant feedback and the results of the study, we provide an updated LDPE intensity calibration protocol to address the issues highlighted in the interlaboratory study. We also comment on the lack of implementation of a consistent and traceable intensity calibration method across the community of x-ray photoelectron spectroscopy (XPS) users and, therefore, propose a route to achieving this with the assistance of instrument manufacturers, metrology laboratories, and experts leading to an international standard for XPS intensity scale calibration.

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