Duty cycle estimate of photoresist gratings via monitoring TM/TE diffraction efficiency ratio during development

We present an in situ duty cycle control method that relies on monitoring the TM/TE diffraction efficiency ratio of the -1st transmitted order during photoresist development. Owing to the anisotropic structure of a binary grating, at an appropriately chosen angle of incidence, diffraction efficiencies in TE and TM polarizations vary with groove depth proportionately, while they vary with duty cycle differently. Thus, measuring the TM/TE diffraction efficiency ratio can help estimate the duty cycle during development while eliminating the effect of photoresist thickness uncertainty. We experimentally verified the feasibility of this idea by fabricating photoresist gratings with different photoresist thicknesses. The experimental results were in good agreement with theoretical predictions.