薄脆饼
材料科学
晶片测试
产量(工程)
薄板电阻
计算机科学
光电子学
纳米技术
复合材料
图层(电子)
作者
Brad Smith,Donald Hall,Garrett Tranquillo
标识
DOI:10.1109/icmts55420.2023.10094145
摘要
A new, cage-like structure is presented and is shown to be able to electrically identify a probe needle that has fallen slightly off its probe pad, even when the standard probe resistance structure (pads shorted together) reports “good” probe resistance. Using both structures together enables a more accurate evaluation of a probe system’s capabilities. Both test structures were used to compare three types of probe cards, reporting the smallest probe pad size that provides 100& probe yield.
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