表征(材料科学)
接触电阻
GSM演进的增强数据速率
计量学
电接点
计算机科学
度量(数据仓库)
接触面积
过程(计算)
进程窗口
材料科学
光学
纳米技术
人工智能
光电子学
物理
操作系统
复合材料
数据库
图层(电子)
作者
Eitan N. Shauly,Israel Rotstein,Ishai Schwarzband,Ofer Edan,Shimon Levi
摘要
The aggressive design rules of deep sub-micron technology using Cu metal over Wplugs,
makes process monitoring and characterization a real challenge. Lack of metal
coverage above contact may cause yield degradation due to un-predicted contact
resistance. Due to proximity effects and Optical-Proximity-Correction (OPC)
restrictions, different layout configuration of metal-over-contact may results in different
contact coverage by the metal. From metrology point-of-view, the ability to control
process latitude of two constituent layers in the semiconductor process is critical. The
basic way to develop and control Metal over Contact process with a CD-SEM is to
measure the contact plugs through the metal trenches. This approach proposes a
significant metrological challenge. There is no edge topography, only material contrast,
and only part of the Contact can be seen. Hence, innovative algorithms and image
processing techniques are required to accurately measure the metal-over-contact area
coverage.
In this paper, we demonstrate a reliable characterization and monitoring method. A
dedicated test chip was designed for this purpose, having ~650 of different layout
configurations and dimensions, in one nanometer variation. The methodology flow
consists of using systematic Edge-Contour-Extraction (ECE). The physical parameters
extracted from the ECE measurements analysis are used for several purposes: (i)
identification of design-rule verification, (ii) contact resistance calculation based on the
metal-over-contact coverage area, (iii) reliable feedback for OPC correction efficiency.
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