光电子学
光子学
光子
材料科学
砷化镓
带隙
绝缘体上的硅
蚀刻(微加工)
光子晶体
绝缘体(电)
硅
纳米技术
光学
物理
图层(电子)
标识
DOI:10.14711/thesis-991013248657503412
摘要
Aluminium gallium arsenide (AlGaAs) is a promising material to realise nonlinear optical frequency conversions and photon-pair generations due to its high nonlinear optical susceptibilities. Its versatile bandgap and direct bandgap through adjustment of its alloy composition can potentially lead to a potent monolithic electrically-injected photon-pair source. In this dissertation, we will be focusing on developing the AlGaAs-on-insulator (AOI) photonic platform for nonlinear optical frequency conversions and photon-pair generations. We develop the process flow to bond commercially available AlGaAs substrates on silicon carriers. We develop dedicated etching processes to pattern our devices on AOI chips of different aluminium contents. We demonstrate loaded Q's in the range of ~104 in...[ Read more ]
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