Fabrication and manipulation for key elements of magnetic-driven speed-reduction micro-motor

The motion of magnetic-driven micro motor is controlled by external magnetic field, does not need any fuel which has good biocompatibility. However, its driving torque needs to be further improved. For it, a magnetic-driven micro-motor with speed-reduction function is proposed. The main elements for the micro-motor includes wave generator, central ring, and movable tooth frame which had to be fabricated with Electron beam lithography and vacuum evaporation coating technology. So, related processing parameters should be optimized to obtain high quality elements of the micro-motor. Here, a magnetic-driven micro-motor with speed-reduction function is proposed. Fabrication and manipulation techniques of the main elements for the micro-motor, such as wave generator, central ring, and movable tooth frame, are studied. Electron beam lithography, electron microscope, and atomic force microscopy (AFM) are applied to optimize the parameters of electron beam lithography. The optimized photolithography parameters are obtained, by which the micro movable tooth frame is successfully developed, and the photoresist molds of the wave generator and central ring is produced. Using vacuum evaporation coating technology, effect of evaporation rate on the quality of micro-parts is studied. The optimized evaporation rate is obtained, by which the nickel-based wave generator and copper-based center ring are successfully developed. The nickel-based wave generator and copper-based central ring are effectively peeled off from the substrate by ultrasonic oscillation technique. The effective manipulation of the wave generator and central ring is accomplished by AFM and piezoelectric-driven micro-probe.