A Closed-Loop <formula formulatype="inline"> <tex Notation="TeX">$\Sigma\Delta$</tex></formula> Interface for a High-Q Micromechanical Capacitive Accelerometer With 200 ng/<formula formulatype="inline"><tex Notation="TeX">$ \surd$</tex></formula>Hz Input Noise Density

In this paper, a fully-differential high-order switched-capacitor (SC) sigma-delta (ΣΔ) interface in a standard 0.5 μm CMOS technology for a micromechanical capacitive accelerometer is presented. A 1 bit digital output is attained by the interface circuit based on a low-noise front-end and a back-end third-order SC ΣΔ modulator, avoiding the use of a separate high-resolution ΣΔ converter to digitize the analog feedback signal. In addition, a micromechanical capacitive sensor element with a high quality factor (high-Q) is used to achieve high-resolution. Furthermore, closed-loop operation and electrical compensation are employed for damping the high-Q to ensure the stability of the high-order system. The sensor consumes 23 mW of power from a single 7 V supply at a sampling clock of 250 kHz. Meanwhile, a sensitivity of 1.896 V/g is achieved with a noise floor of lower than 200 ng /√Hz in low-frequency. The sensor has a nonlinearity of 0.15% with an input range of ±1.2g. The bandwidth (BW) is 300 Hz and the bias instability is 18 μg.