材料科学
焦耳加热
纳米线
硅
纳米技术
光电子学
溅射
图层(电子)
纳米颗粒
电极
焦耳(编程语言)
甲基丙烯酸甲酯
复合材料
薄膜
聚合物
化学
物理化学
功率(物理)
物理
单体
量子力学
作者
Chunhui Chen,Shuguang Deng,Chaofeng Sang,Jeng-Tzong Sheu
出处
期刊:Nano Letters
[American Chemical Society]
日期:2011-10-25
卷期号:11 (11): 4736-4741
被引量:16
摘要
We report a mask-free technique for the local synthesis of ZnO nanowires (NWs) on polysilicon nanobelts and polysilicon NW devices. First, we used localized joule heating to generate a poly(methyl methacrylate) (PMMA) nanotemplate, allowing the rapid and self-aligned ablation of PMMA within a short period of time (ca. 5 μs). Next, we used ion-beam sputtering to prepare an ultrathin Au film and a ZnO seed layer; a subsequent lift-off process left the seed layers selectively within the PMMA nanotemplate. Gold nanoparticles and ZnO NWs were formed selectively in the localized joule heating region.
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