X射线光电子能谱
磷化物
氩
杂质
铝
溅射
氧气
化学
分析化学(期刊)
信号(编程语言)
磷化铟
无机化学
材料科学
薄膜
纳米技术
生物化学
核磁共振
环境化学
光电子学
催化作用
物理
有机化学
程序设计语言
砷化镓
计算机科学
作者
Canping Pan,Weixi Li,Shuren Jiang
摘要
XPS-ESCA analysis showed small signal for phosphorus in fresh specimens of aluminum phosphide (AlP). After removal of a layer of about 0.5 – 1.0 μm by argon ion sputtering, it was observed that signal intensities from oxygen and aluminum increased. The oxygen signal decreased as a function of sputtering time, synchronously with the increase of the phosphorous signal from the AlP nucleus. The aluminum signal, which was considered to be mainly due to AlP and Al(OH)3, remained constant. Other impurity elements including N, Mg, etc., were identified in the technical 85% AlP and AlP tablet formulated products.
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