Movement Modeling and Testing of a Novel Trans-Scale Precision Positioning Stage Based on the Stick-Slip Effect

A novel trans-scale precision positioning stage based on the stick-slip effect was developed. Combining with LuGre friction model, the flexible movement model of the stick-slip driving was established and simulated in Simulink software. Simulation analysis got the displacement and speed curve of slider and the net displacement of each step was calculated. The movement of slider lags behind the PZT actuator. The testing prototype of the stage driving by stick-slip effect was designed and the movement parameters of forward and reverse direction was tested, the results of movement model and simulation was verified by the testing datas. The problem of the difference of forward and reverse movement was proposed.