Theoretical and experimental investigation of vibration-assisted scratching silicon

Interaction between tip and workpiece plays a crucial role in determining the scratching depth in Vibration-assisted Tip Based Nanofabrication (VTBN), which is more complicated than that of conventional scratching (without vibration-assisted). To establish the relationship between the scratching depth and machining parameters, a cubecorner indenter is employed to conduct VTBN procedure. The indenter is simplified as a cone to calculate the contact model in both 1D groove and 2D surface machining processes. An instantaneous normal load model is established based on the developed tip-workpiece contact model. Due to the variation of instantaneous contact area, effective contact area is put forward for the first time to predict the normal load. Effects of vibration frequency and amplitude on the normal load and surface quality are analyzed based on the proposed model. Experimental results show that higher frequency and larger amplitude will reduce the effective contact area. Vibration can increase the scratching depth and width without enlarging the cutting force. Furthermore, the inconsistency caused by scratching directions in conventional scratching is also overcome during VTBN.