微透镜
光学
焦距
材料科学
平版印刷术
镜头(地质)
电子束光刻
纳米压印光刻
制作
抵抗
下一代光刻
光电子学
焦点
紫外线
X射线光刻
光刻
基点
纳米技术
物理
医学
替代医学
图层(电子)
病理
作者
Saaya Senzaki,Takao Okabe,Jun Taniguchi
标识
DOI:10.1016/j.mee.2022.111776
摘要
Optical lenses with multiple focal points are expected to have applications in fields such as medical imaging. As a method to efficiently fabricate these structures, we propose a two-step lithography method that uses an electron beam resist capable of ultraviolet-nanoimprint lithography (UV-NIL) that was developed in our laboratory. Using this method, a microlens array is prepared by UV-NIL and a concentric-circle microlens having a different focal point from the microlens is prepared by electron beam lithography (EBL). This makes it possible to achieve two focal points, the focal point of the microlens and the focal point of the concentric-circle microlens. Furthermore, using this lens as a mold, an inversion pattern is produced again with UV-NIL. It was confirmed that the lens has a focal point of 3 mm by the microlens array and of 8 mm by the concentric-circle microlens. In this study, we create a microlens array with UV-NIL and expose the concentric pattern to the lens area with EBL to create a bifocal lens.
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