光子学
材料科学
光子晶体
光电子学
制作
多路复用
氮化硅
硅光子学
光子集成电路
氮化物
红外线的
灵活性(工程)
硅
光学
纳米技术
计算机科学
电信
物理
图层(电子)
医学
统计
替代医学
数学
病理
作者
Thalia Domínguez Bucio,Cosimo Lacava,Marco Clementi,Joaquín Faneca,Ilias Skandalos,Anna Baldycheva,Mattéo Galli,Kapil Debnath,Periklis Petropoulos,Frédéric Y. Gardes
标识
DOI:10.1109/jstqe.2019.2934127
摘要
In recent years, silicon nitride (SiN) has drawn attention for the realisation of integrated photonic devices due to its fabrication flexibility and advantageous intrinsic properties that can be tailored to fulfill the requirements of different linear and non-linear photonic applications. This paper focuses on our progress in the demonstration of enhanced functionalities in the near infrared wavelength regime with our low temperature (<;350 °C) SiN platform. It discusses (de)multiplexing devices, nonlinear all optical conversion, photonic crystal structures, the integration with novel phase change materials, and introduces applications in the 2 μm wavelength range.
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