材料科学
微加工
热电效应
光电子学
炸薯条
电压
能量收集
热电冷却
功率(物理)
纳米技术
电气工程
制作
医学
物理
替代医学
病理
量子力学
热力学
工程类
作者
Zekun Liu,Shuai Zhang,Zhenhua Wu,Erzhen Mu,Hong Wang,Yan Liu,Huilie Shi,Zhiyu Hu
出处
期刊:Nano Energy
[Elsevier]
日期:2023-09-01
卷期号:114: 108611-108611
被引量:3
标识
DOI:10.1016/j.nanoen.2023.108611
摘要
Miniaturized thermoelectric devices (TED) possess great benefits in energy converting and sensing. By employing improved microfabrication technology, we succeed made an ultra-highly integrated TED with enhanced interfacial and structural qualities at a high filling factor of 61 %. Our micro-TED (2 cm × 2 cm×6 µm, 10,082 TE pairs) achieved an open-circuit voltage up to 2.6 V, an output power of 1.2 mW (temperature difference of 62.8 K). The micro-TED delivered a large temperature gradient up to ∼600 K/mm with input current, achieving a net cooling temperature of 3.6 K with a 3 µm thick thermoelectric layer. As a novel microflow sensor, micro-TED can distinguish ultra-slow cold/hot airflows down to 4 mm/s. The ultra-thin integrated micro-TED can find multi-featured applications in ultra-low-grade thermal energy harvesting, localized chip-to-chip cooling, and hypersensitive sensing.
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