Reliability of wire-bonding and solder joint for high temperature operation of power semiconductor device

材料科学 扫描电子显微镜 焊接 复合材料 接头(建筑物) 半导体 引线键合 光电子学 结构工程 电气工程 炸薯条 工程类
作者
Yuri Yamada,Y. Takaku,Yasuyuki Yagi,I. Nakagawa,Takashi Atsumi,Mikio Shirai,Ikuo Ohnuma,K. Ishida
出处
期刊:Microelectronics Reliability [Elsevier BV]
卷期号:47 (12): 2147-2151 被引量:96
标识
DOI:10.1016/j.microrel.2007.07.102
摘要

Thick Al wires bonded on chips of power semiconductor devices were examined for thermal cycle tests, then the bonded joints were cut using microtome method, after that those were observed by scanning electron microscope and analyzed by electron back scattered diffraction. Some cracks were observed between Al wires and the chips, unexpectedly the crack lengths were almost constant for −40/150 °C, −40/200 °C and −40/250 °C tests. It is considered that re-crystallization has been progressed during the high temperature side of the thermal cycle tests. Furthermore, joint samples were prepared using high temperature solders such as Zn–Al and Bi with CuAlMn, Direct Bonded Copper insulated substrates and Mo heatsinks. The fabricated samples were evaluated by scanning acoustic microscope before and after thermal cycle tests. Consequently, almost neither serious damages nor delaminations were observed for −40/200 °C and −40/250 °C tests.

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