材料科学
残余应力
模具(集成电路)
热膨胀
复合材料
硅
基质(水族馆)
激光烧蚀
激光器
烧蚀
电介质
压力(语言学)
印刷电路板
光电子学
光学
电气工程
物理
地质学
工程类
哲学
航空航天工程
纳米技术
海洋学
语言学
作者
Masamitsu Matsuura,Tanemasa Asano,Haruichi Kanaya
标识
DOI:10.1109/eptc53413.2021.9663982
摘要
The residual stress of the silicon die in an embedded die substrate was investigated. A silicon test element chip having piezo-resistance gauges was embedded in a printed circuit board substrate with the newly developed hollow chamber and laser-drilled slits around die technology. The embedded die was mechanically held with a copper redistribution layer (RDL), and dielectric epoxy resin remained at a part of the periphery. Slits of various designs were fabricated. The residual stresses near the center and a corner of the chip and their change with temperature were measured. The laser slits enabled to reduce the residual stress due to the difference in coefficient of thermal expansion (CTE) between materials.
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