Laser doping for rapid diffusion in silicon

Chapter Contents: 7.1 The origin of laser doping for silicon solar cell manufacturing 7.2 Dopant diffusion in crystalline silicon 7.2.1 Conventional doping methods 7.2.2 Laser doping 7.3 Approaches for laser doping 7.4 Impact of laser parameters on doping profiles 7.4.1 Characterisation of laser-doped regions 7.4.1.1 Sheet resistance 7.4.1.2 ECV/SIMS 7.4.1.3 SEM/EBIC 7.4.2 Type of laser 7.4.3 Diffusion profile in laser-doped regions 7.4.4 Impact of laser speed 7.4.5 Choice of wavelength 7.4.6 Beam optics 7.5 Chapter summary References