Biocompatible Parylene-C Laser-Induced Graphene Electrodes for Microsupercapacitor Applications

Laser irradiation of polymeric materials has drawn great attention as a fast, simple, and cost-effective method for the formation of porous graphene films that can be subsequently fabricated into low-cost and flexible electronic and energy-storage devices. In this work, we report a systematic study of the formation of laser-induced graphene (LIG) with sheet resistances as low as 9.4 Ω/sq on parylene-C ultrathin membranes under a CO₂ infrared laser. Raman analysis proved the formation of the multilayered graphenic material, with I_D/I_G and I_2D/I_G peak ratios of 0.42 and 0.65, respectively. As a proof of concept, parylene-C LIG was used as the electrode material for the fabrication of ultrathin, solid-state microsupercapacitors (MSCs) via a one-step, scalable, and cost-effective approach, aiming at future flexible and wearable applications. The produced LIG-MSC on parylene-C exhibited good electrochemical behavior, with a specific capacitance of 1.66 mF/cm² and an excellent cycling stability of 96% after 10 000 cycles (0.5 mA/cm²). This work allows one to further extend the knowledge in LIG processes, widening the group of precursor materials as well as promoting future applications. Furthermore, it reinforces the potential of parylene-C as a key material for next-generation biocompatible and flexible electronic devices.